Chemical mechanical planarization (CMP) is used during the semiconductor manufacturing process at each layer of the wafer to remove excess materials and create a smooth surface. This is done through the interaction of a pad and slurry on a polishing tool.
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The main functions of the retainer ring are :
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CMP retainer rings require excellent chemical resistance, high mechanical strength and thermal stability. In CMP, there is both a mechanical and chemical actions. The retainer ring plastic must have good wear resistance as it is subjected to:
The wear debris should not to be hard, sticky, or anything that might harm the silicone wafer, like a black speck. So neat polymers are commonly used. Low ionic contamination levels and good processability in extrusion are also important.
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