Main Applications
Theory of Process and Materials
CAPABILITIES

Semiconductor

1. Electronic circuit formation

2. Dielectric layer formation

Display

1.  Transistor and color filter

2. RGB layer formation
(Color Resist)


TheoryPatterningPhotolithography
Process
Coating
  1. Spin coating
  2. Softbake
UV exposure
  1. Mask alignment
  2. UV Exposure
Develop 
  1. Develop
Materials
  1. General Photoresist
  2. Photo sensitive Polyimide
Core Equipment at ADL Ewha site
1. Spin coating on Substrate
2. Mask Alignment and UV Exposure
3. Develop


Core Competitiveness at ADL Ewha
Evaluation Data Library
Current Project Introduction
  1. Photo Sensitive Material Formulation Testing
2. Coating and Patternability Evaluation
3. Analysis and Reliability Testing
Commercialized ProductsAZ series, JSR Series
Customized Products

Photo Sensitive PI development at Ewha ADL Team